This triennial (now biennial) meeting brings together physicists, chemists, material and electronic engineers from universities, research institutions and industry who are involved in various studies and applications of electron beam equipment and technologies from different countries: Germany, Russian Federation, Ukraine, Japan, USA, U.K., Czech Republic, Slovakia, France, China, Poland, India, etc. The conference is one of a series, which started in 1985 in Varna by Corr. Member of BAS, Prof. DSc. Georgi Mladenov and has remained the venue for all subsequent meetings. Due to COVID-19 pandemic, which had a tremendous effect on all of us, the fourteenth EBT conference was rescheduled from 2020 to 2022. During the period from the First International Conference on EBT there have been great advances in the field. The success of the thirteen events of this series clearly demonstrates that the scientist and engineers, working in the academia and research and development laboratories of industry continue to make contributions to technology development of community life, based on knowledge. The organized event will show a great scope of activities and the big potential of developed technologies to increase efficiency of industrial fabrication, to create new products and to improve the life standards. Electron beam technologies celebrate now 70 years from the first machines and industrial technologies based of application of intense electron beams in vacuum. In the Proceedings of Conferences on EBT in Varna, organized during the last almost 40 years is traced the history of ideas, the basic objectives in our field. Personal success of two-three generations researchers could be also seen. Together with the remarkable conventional topics as beam physics and generation, electron beam welding, electron beam melting and refining, electron beam evaporation and deposition of functional coatings and electron accelerator applications for modification of various materials, the flexibility of the conference topics according the subjects of interest of the participating organizations can be pointed by the presented new nanotechnology investigations, a group of sophisticated modern surface treatment methods, additive technologies, as well as the new topic - cyber-physical systems, intelligent industrial system control, data analytica, industrial IoT, cloud computing, digital tweens for electron beam and related technological processes. This and all thirteen previous conferences of this series have provided an excellent forum for exchange of results and experience in the development of EB technologies and also were a place for forging human links and for developing learning and understanding between participants. They are also a place to find new partners, cooperation activities, to associate for international projects, work/educational programs and to establish new business contacts.